Turbo Molecular pump

Turbo Molecular pump

Working principle:

Composed of multi-stage turbine like rotors and blade disks rotating within the casing. 

Stator disks with blades of similar geometric shapes are arranged in a mirrored manner between rotor disks. When gas particles collide with rotor blades, the impact accelerates them in the direction of rotation (i.e. pumping direction). The blades of the next stator disk further guide it in the pumping direction, where it is guided to the next rotor disk and receives another thrust.

Characteristic:

1. Suitable for high vacuum, ultra-high vacuum, and extremely high vacuum environments.

2. High efficiency.

3. The design is compact, lightweight, and highly flexible, allowing for the integration of turbomolecular pumps into systems with limited space.

4. Reduce production downtime by directly replacing bearings and operating materials on the production site.

5. Drive advanced electronic devices to reduce power transmission losses.